System and method for generating a yield forecast based on wafer acceptance tests
US9207277B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2012 |
| Grant date | Dec 8, 2015 |
| Priority date | — |
| Expiry date | May 14, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wafer acceptance test (WAT) system and method that, in one embodiment, includes: (1) a saturation current WAT subsystem operable to generate a weighted standard deviation based on target NMOS and PMOS saturation currents and saturation current WAT results, (2) a wafer IC speed WAT subsystem operable to generate a speed performance probability distribution of wafer ICs based on the weighted standard deviation and speed WAT results, (3) a wafer IC power WAT subsystem operable to employ the speed WAT results and power WAT results to generate a power performance model of wafer ICs, and (4) a yield calculator operable to generate a power performance variance probability distribution of wafer ICs based on the power performance model and the power WAT results, and to employ the speed performance probability distribution and the power performance variance probability distribution to generate the yield forecast with respect to a target performance profile.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.