Method for manufacturing organic EL element, organic EL element, organic EL display panel, organic EL display apparatus, and organic EL light-emitting apparatus
US9209401B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2013 |
| Grant date | Dec 8, 2015 |
| Priority date | — |
| Expiry date | Sep 13, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/631
Abstract
Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.