Patent · US Active

Imaging, fabrication and measurement systems and methods

US9212899B2 · kind B2 · utility

19Cited by
17References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 15, 2011
Grant dateDec 15, 2015
Priority date
Expiry dateJul 28, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/52
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A fabrication system comprises one of a substrate and work piece having at least one working surface, a tool coupled to a tool holder, at least one measurement system, and a control system. The at least one working surface comprises one or more regions. A first location of the tool, tool holder, and the one of a substrate and work piece are calibrated with reference to a coordinate system. The tool is adapted to affect creation of a device within the one or more regions. The at least one measurement system is adapted to obtain location information of at least a portion of at least one of the tool, tool holder, and one of a substrate and a work piece. The control system is adapted to receive the location information, determine a second location, and provide one or more output signals to one or more adjustment devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.