Surface features characterization
US9212900B2 · kind B2 · utility
5Cited by
57References
15Claims
0Family size
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Key dates
| Filing date | Jun 28, 2013 |
| Grant date | Dec 15, 2015 |
| Priority date | — |
| Expiry date | Nov 26, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including a photon detector array configured to receive photons scattered from features in a surface of an article; and a characterization means for characterizing the features in the surface of the article, wherein the characterization means contrasts signals from the photon detector array corresponding to two sets of photons scattered from features in the surface of the article, and the two sets of photons respectively originate from photon emitters at different locations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.