Method of inline manufacturing a solar cell panel

US9214589B2 · kind B2 · utility

Assignee

• Oerlikon Advanced Technologies AG · LI

Inventors

• Stephan Voser · Buchs, CH
• Oliver Rattunde · Buchs, CH
• Martin Dubs · Maienfeld, CH
• Gerald Feistritzer · Bregenz, AT
• Volker Wuestenhagen · Feldkirch, AT
• Gerhard Dovids · Grabs, CH

Key dates

• Filing date: Mar 15, 2010
• Grant date: Dec 15, 2015
• Expiry date: Mar 15, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E10/50
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Throughput of manufacturing thin-film solar panels by inline technique is made substantially independent from the time extent of different surface treatment steps by accordingly subdividing treatment steps in sub-steps performed in inline subsequent treatment stations. Treatment duration in each of the subsequent treatment stations is equal(τ).