Patent · US Active

Compound semiconductor devices and methods for fabricating the same

US9214596B2 · kind B2 · utility

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20Claims
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Key dates

Filing dateOct 26, 2011
Grant dateDec 15, 2015
Priority date
Expiry dateMar 23, 2032

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/734
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

According to the present invention, a method for manufacturing a compound semiconductor comprises: forming a graphene-derived material layer on either a first selected substrate or a first selected compound semiconductor layer; forming a second compound semiconductor layer of at least one layer on at least said graphene-derived material layer, and changing the graphene-derived material layer so as to separate said second compound semiconductor layer of at least one layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.