Method for forming DLC film on spline shaft and hot cathode PIG plasma CVD device
US9217196B2 · kind B2 · utility
2Cited by
0References
6Claims
0Family size
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Key dates
| Filing date | Aug 24, 2012 |
| Grant date | Dec 22, 2015 |
| Priority date | — |
| Expiry date | May 14, 2033 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16D2300/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.