Stabilization structure including shear release posts
US9217541B2 · kind B2 · utility
167Cited by
43References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2013 |
| Grant date | Dec 22, 2015 |
| Priority date | — |
| Expiry date | Jan 1, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A stabilization structure includes a stabilization layer on a carrier substrate. The stabilization layer includes an array of staging cavities. An array of micro devices are within the array of staging cavities. Each micro device is laterally attached to a shear release post laterally extending from a sidewall of a staging cavity. A pressure is applied to the array of micro devices from the array of transfer heads to shear the array of micro devices off the shear release posts. The sheared off micro devices are picked up from the carrier substrate using the array of transfer heads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.