Compact and low loss Y-junction for submicron silicon waveguide
US9217829B2 · kind B2 · utility
7Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2013 |
| Grant date | Dec 22, 2015 |
| Priority date | — |
| Expiry date | Mar 1, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1215
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguides. The design was performed using FDTD and particle swarm optimization (PSO). The device was fabricated in a 248 nm CMOS line. Measured average insertion loss is 0.28±0.02 dB across an 8-inch wafer. The device footprint is less than 1.2 μm×2 μm, orders of magnitude smaller than MMI and directional couplers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.