Dual single-crystal backplate microphone system and method of fabricating same
US9219963B2 · kind B2 · utility
5Cited by
13References
11Claims
0Family size
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Key dates
| Filing date | Nov 20, 2013 |
| Grant date | Dec 22, 2015 |
| Priority date | — |
| Expiry date | Nov 20, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A dual backplate MEMS microphone system includes a flexible diaphragm sandwiched between two single-crystal silicon backplates. Such a MEMS microphone system may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.