Directional solidification furnace for reducing melt contamination and reducing wafer contamination
US9222196B2 · kind B2 · utility
0Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2012 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Sep 21, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1092
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A directional solidification furnace includes a crucible for holding molten silicon and a lid covering the crucible and forming an enclosure over the molten silicon. The crucible also includes an inlet in the lid for introducing inert gas above the molten silicon to inhibit contamination of the molten silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.