Electro-optic silicon modulator with alternative capacitance-loaded coplanar waveguide structures
US9223185B2 · kind B2 · utility
1Cited by
4References
10Claims
0Family size
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Key dates
| Filing date | Aug 8, 2014 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Aug 8, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/122
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the present disclosure provide a high-speed silicon modulator without the microwave mode conversion and provide 50-ohm impedance matching to drivers simultaneously. In one aspect, a device may include an input waveguide region, an optic splitter, two optic phase shifters, an optic splitter, and an output waveguide. The device may include two curved waveguides. Either or both of the curved waveguides may have specially doped regions including PN junctions or MOS capacitors. The PN junctions or MOS capacitors may be alternatively connected to both slots of a coplanar waveguide forming the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.