Mask plate and manufacturing method thereof
US9223198B2 · kind B2 · utility
0Cited by
5References
13Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 31, 2013 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Mar 20, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/56
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the present invention disclose a mask plate and a manufacturing method thereof. The mask plate includes a mask plate body and a transmissive member, wherein the mask plate body has a transmissive part and a non-transmissive part adjacent to the transmissive part, the transmissive member is disposed corresponding to the transmissive part of the mask plate body, the absorbance of the transmissive member progressively increases in a direction away from a center region of the transmissive member to a edges region of the transmissive member close to the non-transmissive part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.