Shielded metal-oxide-metal (MOM) capacitor structure
US9224685B1 · kind B1 · utility
3Cited by
0References
15Claims
0Family size
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Key dates
| Filing date | Mar 9, 2012 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Mar 17, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A metal-oxide-metal (MOM) capacitor structure is disclosed. The MOM capacitor includes a plurality of layers, each layer having a plurality of electrodes. The plurality of electrodes, separated by oxide layers, forms a first plate and a second plate of the MOM capacitor. The plurality of electrodes on each of the layers is coupled to a plurality of electrodes on an adjacent layer through a plurality of vias. A shield layer is coupled to each of the electrodes that forms the second plate of the MOM capacitor on each of the plurality of layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.