Silicon thin film solar cell having improved haze and methods of making the same
US9224892B2 · kind B2 · utility
2Cited by
13References
16Claims
0Family size
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Key dates
| Filing date | Dec 21, 2009 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Sep 2, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
Abstract
A method of increasing the haze of a coating stack having a top layer and an undercoating layer using a chemical vapor deposition coating process includes at least one of: increasing a precursor flow rate; decreasing a carrier gas flow rate; increasing a substrate temperature; increasing a water flow rate; decreasing an exhaust flow rate; and increasing a thickness of at least one of the top layer or undercoating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.