Method for manufacturing organic thin-film element, apparatus for manufacturing organic thin-film element, method for forming organic film, and method for manufacturing organic EL element
US9224956B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2013 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Mar 19, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0379
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible is provided. The method includes: rough pumping reducing an internal pressure of a vacuum chamber by using a roughing pump, the roughing pump being a mechanical pump that is capable of reducing the internal pressure of the vacuum chamber to be less than 15 Pa; main pumping reducing the internal pressure of the vacuum chamber by using a main pump after the rough pumping, the main pump being a non-mechanical pump. Transition from the rough pumping to the main pumping is performed when the internal pressure of the vacuum chamber is no less than 15 Pa.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.