Sensor chip, detection device, and method of manufacturing sensor chip
US9228945B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 22, 2011 |
| Grant date | Jan 5, 2016 |
| Priority date | — |
| Expiry date | Aug 8, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/107
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor chip includes a substrate, a relief structure composed of protruding sections formed so as to be arranged on a surface of the substrate to have a lattice shape and a recessed section between the protruding sections, and fine metal particles arranged along upper ridge lines of the respective protruding sections of the relief structure, the protruding sections being adjacent to each other, having a minute gap with which the surface plasmon resonance occurs. By irradiating the gap between the fine metal particles with a laser beam, the localized surface plasmon resonance occurs more efficiently. As a result, the sensor chip capable of taking out the surface enhanced Raman scattering to thereby detect the substance with high sensitivity can be realized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.