Adjustable cathodoluminescence detection system and microscope employing such a system
US9228962B2 · kind B2 · utility
1Cited by
5References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 13, 2014 |
| Grant date | Jan 5, 2016 |
| Priority date | — |
| Expiry date | Nov 13, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2808
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cathodoluminescence detection system is provided, including
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.