Microfluidic surface processing systems with self-regulated distance-to surface control
US9229455B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2014 |
| Grant date | Jan 5, 2016 |
| Priority date | — |
| Expiry date | Jun 23, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8593
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microfluidic surface processing system includes a microfluidic probe head having a processing fluid circuit configured to dispense a surface processing fluid from a processing fluid aperture thereof; a linkage mechanism, configured to apply a force to or modulate a force applied to the microfluidic probe head towards a surface to be processed; and a lifting fluid circuit integral with the microfluidic probe head and distinct from the processing fluid circuit, the lifting fluid circuit designed for dispensing a lifting fluid from a lifting fluid aperture thereof, with pressure such as to counter the force applied or modulated by the linkage mechanism, at the level of the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.