Production process for a micromechanical component and micromechanical component

US9233841B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Friedjof Heuck · Stuttgart, DE
• Christoph Schelling · Stuttgart, DE
• Mirko Hattass · Stuttgart, DE
• Benjamin Schmidt · Stuttgart, DE

Key dates

• Filing date: Oct 14, 2013
• Grant date: Jan 12, 2016
• Expiry date: Dec 5, 2033

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0133
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A production process for a micromechanical component includes at least partially structuring at least one structure from at least one monocrystalline silicon layer by at least performing a crystal-orientation-dependent etching step on an upper side of the silicon layer with a given (110) surface orientation of the silicon layer. For the at least partial structuring of the at least one structure, at least one crystal-orientation-independent etching step is additionally performed on the upper side of the silicon layer with the given (110) surface orientation of the silicon layer.