Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology
US9234859B2 · kind B2 · utility
1Cited by
3References
20Claims
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Key dates
| Filing date | Mar 26, 2014 |
| Grant date | Jan 12, 2016 |
| Priority date | — |
| Expiry date | Mar 26, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/68
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated capacitive-type humidity sensor formed in a semiconductor chip integrating a sensing capacitor and a reference capacitor. Each of the sensing and reference capacitors have at least a first electrode and at least a second electrode, the first and second electrodes of each of the sensing and reference capacitors being arranged at distance and mutually insulated. A hygroscopic layer extends on the sensing and reference capacitors and a conductive shielding region extends on the reference capacitor but not on the sensing capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.