Device comprising a fluid channel provided with at least one micro or nanoelectronic system and method for carrying out such a device

US9234879B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Eric Ollier · Grenoble, FR
• Carine Marcoux · Voiron, FR

Key dates

• Filing date: Jul 18, 2014
• Grant date: Jan 12, 2016
• Expiry date: Jul 18, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/1461
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Device including a substrate including at least one microelectronic and/or nanoelectronic structure (NEMS) having a sensitive portion and a fluid channel. The fluid channel includes two lateral walls, an upper wall connecting the two lateral walls, a lower wall formed by the substrate, and at least two openings in order to provide a circulation in the fluid channel, with the openings being defined between the two lateral walls, with the structure being located inside the fluid channel. Electrical connection lines extend between the structure and the outside of the fluid channel, with the connection lines being carried out on the substrate and passing under the lateral walls. The device also includes an intermediate layer having a planar face in contact with base faces of said lateral walls. The connection lines are at least partially covered by the intermediate layer at least immediately above base faces of the lateral walls. The lateral walls are made sealingly integral on the substrate by a sealing layer on the intermediate layer.