Microvalve with integrated flow sensing capability
US9235219B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2013 |
| Grant date | Jan 12, 2016 |
| Priority date | — |
| Expiry date | Jun 30, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for controlling the flow of a fluid from a source to a load includes a source. An on/off type of control valve communicates with the source. A micro-electric mechanical system communicates with the on/off type of control valve. A consuming device communicates with the micro-electric mechanical system. An electronic controller that communicates with the consuming device and the source. The electronic controller measures a change in a parameter of the micro-electric mechanical system that results from the flow of fluid through the micro-electric mechanical system to sense a flow of fluid through a micro-electric mechanical system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.