Patent · US Active

Acceleration sensor and method for operating an acceleration sensor

US9239339B2 · kind B2 · utility

1Cited by

2References

14Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Rolf Kaack · Reutlingen, DE
Dietrich Schubert · Reutlingen, DE
Harald Emmerich · Tübingen, DE
Patrick Wellner · Neckartenzlingen, DE

Key dates

Filing date	Sep 26, 2012
Grant date	Jan 19, 2016
Priority date	—
Expiry date	Jul 14, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0882
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.