Method for manufacturing water-repellent film, and substrate, nozzle plate, ink jet head, and ink jet recording device
US9242466B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 6, 2015 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Jul 6, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09D183/04
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a method for manufacturing a water-repellent film, including an adhesion precursor film forming step of forming, on a substrate, an adhesion precursor film mainly of a Si—O bond with hydrogen directly bonded to Si; an irradiating step of irradiating the adhesion precursor film with excitation energy to increase an OH group present on a surface of the adhesion precursor film to thereby change the adhesion precursor film into an adhesion reinforcing film; and an organic film coating step of coating the adhesion reinforcing film with an organic film by using a silane coupling agent, wherein a content of the hydrogen directly bonded to Si in the adhesion precursor film is 1.0×1017 atoms/cm2 or more in terms of a H2 molecule.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.