Patent · US Active

MEMS-based dual and single proof-mass accelerometer methods and apparatus

US9246017B2 · kind B2 · utility

17Cited by

1References

15Claims

0Family size

Assignee

mCube, Inc. · US

Inventors

Dolf van der Heide · San Jose, US
Shingo Yoneoka · Cupertino, US

Key dates

Filing date	Feb 7, 2013
Grant date	Jan 26, 2016
Priority date	—
Expiry date	Jul 6, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0848
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.