Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator
US9246468B2 · kind B2 · utility
2Cited by
4References
19Claims
0Family size
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Key dates
| Filing date | Aug 23, 2012 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Jan 21, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.