Patent · US Active

Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane

US9250418B2 · kind B2 · utility

2Cited by

7References

10Claims

0Family size

Assignee

SINTEF · NO

Inventors

Thor Bakke · Dresden, DE
Ib-Rune Johansen · Oslo, NO
Andreas Vogl · Unterbechingen, DE
Frode Tyholdt · Oslo, NO
Dag Thorstein Wang · Oslo, NO

Key dates

Filing date	Sep 16, 2010
Grant date	Feb 2, 2016
Priority date	—
Expiry date	Apr 26, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/8554
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.