Solution containment during buffer layer deposition
US9252318B2 · kind B2 · utility
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29References
19Claims
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Key dates
| Filing date | Dec 16, 2013 |
| Grant date | Feb 2, 2016 |
| Priority date | — |
| Expiry date | Jul 10, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/541
Abstract
Improved methods and apparatus for forming thin-film layers of chalcogenide on a substrate web. Solutions containing the reactants for the chalcogenide layer may be contained substantially to the front surface of the web, controlling the boundaries of the reaction and avoiding undesired deposition of chalcogenide upon the back side of the web.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.