Patent · US Active

Solution containment during buffer layer deposition

US9252318B2 · kind B2 · utility

0Cited by
29References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 16, 2013
Grant dateFeb 2, 2016
Priority date
Expiry dateJul 10, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/541

Abstract

Improved methods and apparatus for forming thin-film layers of chalcogenide on a substrate web. Solutions containing the reactants for the chalcogenide layer may be contained substantially to the front surface of the web, controlling the boundaries of the reaction and avoiding undesired deposition of chalcogenide upon the back side of the web.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.