Robot having end effector and method of operating the same
US9254566B2 · kind B2 · utility
21Cited by
3References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2010 |
| Grant date | Feb 9, 2016 |
| Priority date | — |
| Expiry date | Sep 9, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20305
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.