Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
US9254651B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Mar 25, 2013 |
| Grant date | Feb 9, 2016 |
| Priority date | — |
| Expiry date | Mar 25, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/708
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Provided is a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer and electrodes provided on the piezoelectric layer on an upper portion of a zirconium oxide layer, in which the zirconium oxide layer is formed of granular crystal grains.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.