Yaw rate sensor

US9255801B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Burkhard Kuhlmann · Reutlingen, DE
• Rolf Scheben · Stuttgart, DE
• Daniel Christoph Meisel · Pittsburgh, US
• Benjamin Schmidt · Stuttgart, DE
• Thorsten Balslink · Kirchentellinsfurt, DE

Key dates

• Filing date: Jun 20, 2013
• Grant date: Feb 9, 2016
• Expiry date: Mar 12, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.