Acid generators and photoresists comprising same
US9256125B2 · kind B2 · utility
0Cited by
34References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2013 |
| Grant date | Feb 9, 2016 |
| Priority date | — |
| Expiry date | Mar 30, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/039
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Acid generator compounds are provided that comprise an oxo-1,3-dioxolane moiety and/or an oxo-1,3-dioxane moiety. The acid generators are particularly useful as a photoresist composition component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.