Overhead hoist transport system
US9257317B2 · kind B2 · utility
4Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2013 |
| Grant date | Feb 9, 2016 |
| Priority date | — |
| Expiry date | Feb 20, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6735
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides an overhead hoist transport system, which includes a rail, a stocker disposed under the rails, wherein the stocker can move along the direction of the rail, and a cleaning station, disposed on the rail to clean the stocker directly when the stocker is moving.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.