Patent · US Active

Mask for evaporation, and method and apparatus for manufacturing the same

US9259805B2 · kind B2 · utility

8Cited by
9References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 9, 2010
Grant dateFeb 16, 2016
Priority date
Expiry dateJan 27, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K71/166
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

Provided is a mask for an evaporation apparatus, which includes a first division mask and a second division mask. The first and second division masks are directly bonded to each other by welding, thereby forming welding portion between the first and the second division masks. A method and apparatus for manufacturing a mask for evaporation are also provided. The division masks according to the embodiment do not use subframes, and are directly bonded to one another by welding, so that a shadow effect does not occur. The apparatus for manufacturing a mask for evaporation includes a work stage, a clamp fixing a first division mask and a second division mask to the work stage, and a laser welding part welding the first division mask to the second division mask. The apparatus may further include a first roller leading the laser welding part and a second roller following the laser welding part.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.