Patent · US Active

Yaw rate sensor

US9261363B2 · kind B2 · utility

0Cited by

3References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Reinhard Neul · Stuttgart, DE
Johannes Classen · Reutlingen, DE
Axel Franke · Ditzingen, DE
Marco Quander · Gerlingen, DE
Joerg Hauer · Reutlingen, DE
Udo-Martin Gomez · Leonberg, DE
Kersten Kehr · Zwota, DE

Key dates

Filing date	Jun 6, 2007
Grant date	Feb 16, 2016
Priority date	—
Expiry date	Sep 28, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5747
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.