MEMS inertial sensor and method of inertial sensing
US9261525B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 2011 |
| Grant date | Feb 16, 2016 |
| Priority date | — |
| Expiry date | Aug 29, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention comprises an inertia! sensor comprising a frame, a proof mass; a first resonant element having a proximal end and a distal end, the first resonant element being fixed to the frame at its proximal end and coupled to the proof mass at its distal end, a second resonant element having a proximal end and a distal end, the second resonant element being fixed to the frame at its proximal end, adjacent to the first resonant element such that there is no coupling between the second resonant element and the proof mass, a means for coupling the first resonant element to the second resonant element; a drive means coupled to the first and second resonant elements for vibrating the first and second resonant elements; and a sensor assembly for detecting the amplitude of vibration of the resonant elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.