Patent · US Active

Integrated circuit comprising a gas sensor

US9263500B2 · kind B2 · utility

2Cited by

1References

8Claims

0Family size

Assignee

AMS INTERNATIONAL AG · CH

Inventors

Aurelie Humbert · Brussels, BE
Roel Daamen · Herkenbosch, NL
Viet Hoang Nguyen · Leuven, BE

Key dates

Filing date	Mar 28, 2013
Grant date	Feb 16, 2016
Priority date	—
Expiry date	Mar 28, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH10N15/10
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.