Silicon condenser microphone
US9264815B2 · kind B2 · utility
3Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 2014 |
| Grant date | Feb 16, 2016 |
| Priority date | — |
| Expiry date | May 22, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/16152
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A silicon condenser microphone is disclosed. The silicon condenser microphone includes a substrate having a top surface, a lower surface opposed to the top surface, and a recess concave from the top surface toward the lower surface. The recess includes a bottom for carrying a chip thereon. The microphone further includes a transducer spanning the recess. By virtue of this configuration, the size of the microphone is reduced, and acoustic performance of the microphone is accordingly improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.