Method for producing trichlorosilane
US9266742B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2011 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Feb 9, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/10778
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A mixture containing methyldichlorosilane, tetrachlorosilane, and trichlorosilane is distilled to fractionate a fraction with a higher content of methyldichlorosilane than the mixture before distillation. Subsequently, the fraction thus fractionated is heated to disproportionate chlorine between methyldichlorosilane and tetrachlorosilane to disproportionate methyldichlorosilane into methyltrichlorosilane. Subsequently, the fraction after disproportionation containing methyltrichlorosilane is purified by distillation to separate high-purity trichlorosilane. Having a close boiling point to that of trichlorosilane (32° C.), which is a target product to be purified by distillation, removal of methyldichlorosilane (boiling point of 41° C.) has been difficult. The present invention removes methyldichlorosilane more easily by converting it into methyltrichlorosilane (boiling point of 66° C.) through disproportionation of chlorine between methyldichlorosilane and tetrachlorosilane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.