Vacuum pump
US9267392B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 28, 2011 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Sep 19, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/5813
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump having substrates which can be wired together easily and cooled easily. A substrate unit structure is formed by covering the opening of the casing of the pump main unit with a plate functioning also as the casing of the control unit. Pins of a terminal fixed while penetrating the plate are soldered directly to an active magnetic bearing (AMB) control substrate and an aerial connection substrate in order to integrate these components. The casing and sealing structures can be of simple construction. A drip-proof structure can be made with the terminal at low cost without using expensive drip-proof connectors. Further, by cooling the plate, electronic components mounted respectively on the AMB control substrate in a vacuum atmosphere and the aerial connection substrate in an air atmosphere can be cooled simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.