Miniaturized integrated micro electro-mechanical systems (MEMS) optical sensor array
US9267923B2 · kind B2 · utility
3Cited by
0References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2011 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Oct 6, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.