Patent · US Active

Scanning probe microscope comprising an isothermal actuator

US9267962B2 · kind B2 · utility

2Cited by
3References
41Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 11, 2014
Grant dateFeb 23, 2016
Priority date—
Expiry dateAug 11, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q10/045
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A single-chip scanning probe microscope is disclosed, wherein the microscope includes an isothermal two-dimensional scanner and a cantilever that includes an integrated strain sensor and a probe tip. The scanner is operative for scanning a probe tip about a scanning region on a sample while the sensor measures tip-sample interaction forces. The scanner, cantilever, probe tip, and integrated sensor can be fabricated using the backend processes of a conventional CMOS fabrication process. In addition, the small size of the microscope system, as well as its isothermal operation, enable arrays of scanning probe microscopes to be integrated on a single substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.