Integrated microtoroids monolithically coupled with integrated waveguides
US9268086B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 13, 2011 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Oct 9, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/855
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photonic apparatus comprises an integrated waveguide, an integrated resonator in the form of a microtoroid and a thermally reflowable film. The reflowable film comprises a first film area and a second film area. The reflowable film is one of a thin film and a stack of thin films. The first film area is thermally reflown, the microtoroid is formed in the thermally reflown first film area. The second film area is not reflown in the immediate vicinity of the microtoroid. The microtoroid is optically coupled to the integrated waveguide located on or located within one of or both of the first or second film areas. The first and second film areas are directly connected to each other. The microtoroid has an edge extending along a circumference. The microtoroid can be a non-inverted or an inverted microtoroid, wherein the second film area is inside or outside of the circumference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.