Device and method for increasing infrared absorption in MEMS bolometers
US9274005B2 · kind B2 · utility
3Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | Aug 20, 2013 |
| Grant date | Mar 1, 2016 |
| Priority date | — |
| Expiry date | Oct 1, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0853
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor sensor includes a substrate and an absorber. The substrate includes at least one reflective component. The absorber is spaced apart from the at least one reflective component by a distance. The absorber defines a plurality of openings each having a maximum width that is less than or equal to the distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.