Electrostatic capacitance sensor
US9274153B2 · kind B2 · utility
1Cited by
6References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2013 |
| Grant date | Mar 1, 2016 |
| Priority date | — |
| Expiry date | Oct 15, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrostatic capacitance sensor 1 includes a semiconductor substrate 4. A first fixing plate 2 is joined to a one-side surface 4a of the semiconductor substrate 4, and a second fixing plate 3 is joined to other-side surface 4b of the semiconductor substrate 4, whereby a space portion S is formed. Then, static electricity suppressing means 70 for suppressing static electricity from being generated in the space portion S is provided in the electrostatic capacitance sensor 1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.