Patent · US Active

Method of stabilizing fluorine-containing acid amplifier

US9274420B2 · kind B2 · utility

4Cited by

0References

14Claims

0Family size

Assignees

CENTRAL GLASS COMPANY, LIMITED · JP
The Research Foundation for the University of New York · US

Inventors

Shinya Akiba · Kawagoe, JP
Ryo Nadano · Saitama, JP
Robert L. Brainard · Albany, US

Key dates

Filing date	Aug 28, 2013
Grant date	Mar 1, 2016
Priority date	—
Expiry date	Aug 28, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/0046
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of stabilizing a fluorine-containing acid amplifier. The method is provided to include the step of dissolving a fluorine-containing acid amplifier in an organic solvent thereby producing a solution of the fluorine-containing acid amplifier, the fluorine-containing acid amplifier being represented by general formula (1):

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.