Patent · US Active

Automated generation of mask file from three dimensional model for use in grayscale lithography

US9275173B2 · kind B2 · utility

5Cited by

2References

17Claims

0Family size

Assignee

University of Louisville Research Foundation, Inc. · US

Inventors

James Loomis · St. Helena, US
Curtis McKenna · Louisville, US
Kevin Walsh · Louisville, US

Key dates

Filing date	Apr 24, 2013
Grant date	Mar 1, 2016
Priority date	—
Expiry date	Apr 24, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F1/70
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method, apparatus and program product automatically generate a grayscale lithography mask file (76) from a three dimensional (3D) model (72) of a desired topography, e.g., as generated by a three dimensional computer aided design (CAD) tool (70).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.