Patent · US Active

Gradient assisted image resampling in micro-lithographic printing

US9275442B2 · kind B2 · utility

2Cited by

6References

16Claims

0Family size

Assignee

Mycronic AB · SE

Inventors

Lars Ivansen · Solna, SE
Anders Osterberg · Täby, SE

Key dates

Filing date	Nov 7, 2014
Grant date	Mar 1, 2016
Priority date	—
Expiry date	Nov 7, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70508
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present disclosure relates to the re-sampling of pixel data, with one application being micro-lithography. In particular, it relates to a first pixel map, including a plurality of white, black and grey scale pixels and gradient directions for one or more of the grey scale pixels, that is resampled to produce a second pixel map using edge geometry data generated from the gradient directions and grey scale values.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.