Process for making PMR writer with non-conformal side gaps
US9275657B1 · kind B1 · utility
1Cited by
658References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2013 |
| Grant date | Mar 1, 2016 |
| Priority date | — |
| Expiry date | Oct 4, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49043
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A process for manufacturing a PMR writer main pole with non-conformal side gaps is provided. The process may include depositing a stitch layer comprising a magnetic material and a second stitch layer material over a substrate, forming an air-bearing surface (ABS) region in a first damascene material, and forming a yoke region in a second damascene material. The first damascene material may include Aluminum Oxide (Al2O3). The second damascene material may include Silicon Dioxide (SiO2). Side gap regions may include SiO2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.